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Design of experiments: optimisation of an ITO sputtering recipe
Florent-Valéry Coen
,
Damien Maillard
,
Matthias Neuenschwander
Florent-Valéry Coen
EPFL
Corresponding Author:
[email protected]
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Damien Maillard
EPFL
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Matthias Neuenschwander
EPFL
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