Film characterization

Resistivity

We assessed the resistivity of our ITO films using a 4-point probe station, namely the KLA-Tencor Prometrix Omnimap RS75, available in the CMi at EPFL. Measurements are performed in the following way : the tool first contacts 4 aligned electrical probes to the film. Then, a DC current is applied between the 2 outer probes, and the voltage between the 2 inner probes is recorded. We thus obtain the sheet resistance of our sample, following the equation :