Modeling for Fabrication

Waveguide Dimension Variations

The wafer height of 220 nm varies and the waveguide width isn't perfect as well as the rectangular waveguide isn't perfect rectangle with not ideal 90 degree angles but slopes like a trapazoid from base to top.  These manufacturing variabilities require analysis with error variance to allow us to know what our expectations are.  For the MZI peak wavelength, insertion loss, group index, FSR and the extinction ratio of the inferometer will all be affected by these manufacturing imperfections. 
Corner analysis is performed to refine our MZI behaviour predictions following a process such as     \cite{Chrostowski_2015}  description below: