Figure 3. The Raman spectra of Cu3N films prepared by magnetron sputtering at different RF power and the working pressures of 3.5 Pa and 5.0 Pa.
The surface of the samples was analysed by AFM. The scanning area was 1x1μm2. Figure 4 shows the surface roughness obtained from the root-mean-square (rms) as function of the RF power. As it can be observed, the higher the rms value, the rougher the surface of the thin film. It was also observed that the smoothest films with close-grained surface morphology were the surface of the samples made at 5.0 Pa and lower RF power values.