Exp. [No.] Argon [sccm] Operating Point [V] Operating Point Range [V] Oxygen Control Range [sccm] Resulting Oxygen Ratio [%] Absolute Chamber Pressure [Pa] Surface Temperature [°C]
1 120 480 470 - 485 52 - 60 30 - 33 7.3 x 10-1 160
2 500 496 - 502 48 - 53 29 - 31 6.8 x 10-1 130
3 520 509 - 523 35 - 45 23 - 27 6.0 x 10-1 135
4 160 410 405 - 416 58 - 76 27 - 32 1.5 150
5 440 436 - 445 48 - 57 23 - 26 1.1 220
6 470 465 - 473 39 - 46 20 - 22 9.3 x 10-1 135
7 200 380 373 - 388 38 - 55 16 - 22 2.0 170
8 400 390 - 407 35 - 51 15 - 20 1.7 130
9 420 416 - 425 30 - 44 13 - 18 1.5 110