Sputter Process Pressure [Pa] Oxygen ratio in Argon/Oxygen-Mix [%] Reference
DC 1.0 20             [10]
1.0 30 [26]
2.7 x 10-1 100 [27]
2.7 x 10-1 16.6 [28]
7.0 x 10-1 30 [29]
7.0 x 10-1 14.6 [27]
pulsed DC 4.0 34.4 [16]
4.0 x 10-1 30 [30]
1.5 30 [17]
6.0 x 10-1 20 [31]