Argon flow [ml/min] Process pressure [Pa] Process pressuse with addition of 70 sccm Oxygen flow [Pa]
100 3.7 x 10-1 0.65 x 10-1
1200 4.4 x 10-1 0.75 x 10-1
140 5.3 x 10-1 9.3 x 10-1
160 6.3 x 10-1 1.1
180 7.2 x 10-1 1.5
200 8.4 x 10-1 2.1
220 1.0 2.8
240 1.4 3.2